Semiconductor Industry

Laboratory and Clean Room Technology

Modular Clean Room Systems

The semiconductor industry with the branches wafer fabrication, microelectronics, solar technology and research & development is in an extremely dynamic environment. The tremendous speed of innovation and the high technological complexity make each investment a strategic decision for our customers to compete internationally. Savings can only be achieved with innovative solutions and new concepts such as Lean Construction Management. Amperox, with its many years of expertise and an extensive database of completed projects, can support its customers at every stage of the project to achieve the current benchmarks.

Perfect environment for your semiconductor manufacturing

Reliable and high-purity cleanroom conditions are the challenges for modern semiconductor fabs. Comprehensive environmental and process control as well as supply technology tailored to the production tools form the basis for guaranteeing the wafer yield over the entire life cycle of a high-tech semiconductor fab.

References Semiconductor

  • Infineon Technologies Dresden

  • Advanced Micro Devices / Globalfoundries Dresden

  • Advanced Mask Technology Center Dresden

Innovative Cleanroom Design

As a committed partner for our customers, Amperox offers solutions from consulting and planning to construction for cleanroom extensions to complex semiconductor production plants. With our experienced team, we can cover the complete range of state-of-the-art cleanroom systems and technologies:

  • HVAC (heating, ventilation, air conditioning)
  • Process Support Systems (chemical, ultrapure water, supply and waste systems)
  • Electrical & Controls (electrical engineering, power and emergency power supply, process and building automation services)
  • Life Safety & Security Systems (gas detection systems, fire detection systems, danger detection systems and access control systems etc.)
  • Hook Up (media supply and integration of semiconductor process tools)

Due to integrated planning with the software solutions EPLAN and REVIT, Amperox specialists are able to visualize the building and facility structure in 3D during all planning and expansion phases. This enables a quick and efficient response to changing operating conditions or customer requirements.